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ISO 14644-1 CLEAN ROOM REQUIREMENT
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The
ISO cleanroom classification standard 14644-1
(implemented in 1999) has replaced the USA FS209E
standard and becomes the international clean room
standard |
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ISO 14644-1 defines a clean room as
¡¥A room in which
the number of concentration of airborne particles is
controlled and which is constructed and used in a manner
to minimize the introduction, generation and retention
of particles inside the room and in which other relevant
parameters e.g. temperature, humidity and pressure, are
controlled as necessary.¡¦
¡¥Cleanrooms can
have one or more clean zones, protecting a critical
area. The environment for a clean process must not
necessarily be a cleanroom but can often be a clean zone
in a less clean room. These clean zones can be provided
by clean benches, work stations, minienvironments and
isolators, the standards of which should also be
considered by the designer.¡¦
ISO 14644-1:1999
CLEAN ROOM STANDARD:
Airborne particle count
cleanliness classification test
|
|
Maximum particles/m3 |
FS
209E |
CLASS |
¡Ù0.1£gm |
¡Ù0.2£gm |
¡Ù0.3£gm |
¡Ù0.5£gm |
¡Ù1£gm |
¡Ù5£gm |
¬Û·í©ó |
ISO 1 |
10 |
2.37 |
1.02 |
0.35 |
0.083 |
0.0029 |
|
ISO 2 |
100 |
23.7 |
10.2 |
3.5 |
0.83 |
0.029 |
|
ISO 3 |
1,000 |
237 |
102 |
35 |
8.3 |
0.029 |
CLASS 1
|
ISO 4 |
10,000 |
2,370 |
1,020 |
352 |
83 |
2.9 |
CLASS 10 |
ISO 5 |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
CLASS 100 |
ISO 6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
CLASS
1,000 |
ISO 7 |
|
|
|
352,000 |
83,200 |
2,930 |
CLASS
10,000 |
ISO 8 |
|
|
|
3,520,000 |
832,000 |
29,300 |
CLASS
100,000 |
ISO 9 |
|
|
|
35,200,000 |
8,320,000 |
293,000 |
ROOM AIR |
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CLEAN ROOM EQUIPMENT
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AIR SHOWER & CARGO
SHOWER |
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to blow away dust from workers before
entering the spray room to enhance the
filtering effect of
"Clean Room"
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FILTERING
SYSTEM
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to maintain the clean room in positive pressure so
that only clean air will be blown in
By use of ¡§Positive Pressurized Theory¡¨, all outside
dirty air can be washed away by 3 layers of filters
to ensure only clean air can be supplied into the
spray room.
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DE-IONIZING
CABINET & DE-IONIZING MACHINE |
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to blow away electro-statics and dust by de-ionized
blower
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CHANGING ROOM |
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Workers need to wear protective clothing (hoods,
face masks, gloves, boots) before entering clean
zones
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LAMINATED PARTITIONS&
EPOXY FLOORING |
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to reduce
electro-statics and dust accumulation
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CLEAN
ROOM REPORT: ISO 14644-1 CLASS 10K |
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OES
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²Ä¤@Ó¼o®ð¼Ë¥»©ó¥»¼t¼Ð·Ç¼QÏ@©â¨ú
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|
COMPONENT
VOC
|
OES
Limit |
Sampling
with standard Water-Wash Spray
Booth
(Shenzhen: 7/1/98) |
Sampling with Specially made Water-Wash
Spray Booth
(Chek Lap Kok:30/7/98) |
Isopropyl alcohol
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400ppm |
<0.1ppm |
<0.1ppm |
n-butyl alcohol
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50ppm |
<0.1ppm |
<0.1ppm |
Ethanol
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200ppm
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0.5ppm
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<0.1ppm |
Methylethyl ketone |
1000ppm |
6.8ppm |
2.8ppm |
Phosphoric acid |
1mg/m3 |
0.2mg/m3 |
<0.05mg/m3 |
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Conclusion
The
concentrations of five different parameters in the paint
mist were measured at Shenzhen (7-1-98) and Chek Lap Kok
(30-7-98) respectively and the results are presented. It is
concluded that the VOC (including Isopropyl alcohol, n-butyl
alcohol, Ethanol, Methylethyl ketone) and Phosphoric acid
arepresent in an insignificant amount and within the OES
limit.
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A note on the quoted OES listed in the above table
The
full name of OES is Occupational Exposure Standard and it is a concentration
of an specific airborne Substance averaged over a reference
period at which there is currently no evidence that
repeated or day after day exposure by inhalation, will be
injurious to the Health of employees. The OES¡¦s
should not be exceeded but if this does occur,
effective measure should be taken to reduce the exposure as soon
as practicable.
The OES quoted here is based on the
EH40 which is a part of The Control of Substances
Hazardous to Health (COSHH) regulations established by
the Health and Safety Executive of UK.
The objective of this regulation is
to prevent disease at workplace due to exposure of
hazardous substances.
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GB/T 16157-1996 |
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